MobBoss
Off-Topic Overlord
Earthquake bombs used as far back as late ww2 were great at collapsing underground constructions. The german sub yard in France was gutted by a single earthquake bomb it left the structure intact but the intense waves wrecked and gutted the internal yards so badly that it put it out of use for the war. Needless to say 100% internal casualties.
EDIT: Entrenched Sams idea is nice idea though moving your surface fleet out leaves it outside the defence umbrella leaving them vunreable to airpower. Once your surface fleet is gone and you enter siege invaders can simply let you wither on the vine.
Singular tunnels arent the same. Such bombs were not used to any great effect against the Japanese, who extensively used tunnels and warrens to defend their islands.
The only other thing I forgot to mention was using anti-pers mines along common areas of approach. Add that in as well.